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An explosion inside an industrial plant in Taunton, MA, injured three employees early Sunday morning, officials said.

IQE plant employees ended up transported and released from Morton Hospital on Sunday after receiving treatment for injuries sustained in a reported explosion inside the company’s 200 John Hancock Road plant at 12:25 a.m., said Taunton police and fire.

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Responding Taunton firefighters were informed hazardous materials might have been released into the air, and as a result, requested a Tier 2 Hazardous Materials Response which determined that there was no danger to the surrounding environment.

“The HazMat crew determined that there was no release of materials into the environment and the danger was confined to a piece of equipment used in manufacturing,” Taunton Fire Department officials said.

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“Officials on-scene determined that the incident involved compressed hydrogen and arsine … At the time of the explosion, the equipment was undergoing maintenance.”

The three IQE employees suffered from flash burns on “their faces and hands,” fire officials said.

Taunton Fire Department confirmed on Sunday afternoon local Occupational Safety and Health Administration personnel are handling the investigation.

A semiconductor company that first started in Wales, UK in 1988, IQE describes itself on its website as a “global supplier of advanced wafer products and wafer services to the semiconductor industry.”

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